Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
AIP Publishing · Q3
ISSN: 0734-211X · 2327-9877
Rankings & quartile
| System | Value | Year | Source |
|---|---|---|---|
| Citation impact (OpenAlex) | 23.4 cites/work Q3 | 2026 | source |
| h-index | 104 | 2026 | source |
Last updated 2026-05-19 · OpenAlex profile
Cite this profile
APA 7Journal Check. (2026). Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena: Journal rankings & quartile. Journal Check. https://journal-check.com/journals/S4210191927/journal-of-vacuum-science-technology-b-microelectronics-processing-and-phenomena MLA 9"Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena: Journal rankings & quartile." Journal Check, 2026, https://journal-check.com/journals/S4210191927/journal-of-vacuum-science-technology-b-microelectronics-processing-and-phenomena. Chicago 17Journal Check. "Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena: Journal rankings & quartile." 2026. https://journal-check.com/journals/S4210191927/journal-of-vacuum-science-technology-b-microelectronics-processing-and-phenomena. GB/T 7714Journal Check. Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena: Journal rankings & quartile[EB/OL]. (2026). https://journal-check.com/journals/S4210191927/journal-of-vacuum-science-technology-b-microelectronics-processing-and-phenomena.See rankings while you search
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