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Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

Publisher unknown · Q3

ISSN: 2166-2746 · 2166-2754

Rankings & quartile

SystemValueYearSource
SCImago (SJR) 0.359 Q3 2025 source
Citation impact (OpenAlex) 10.5 cites/work Q4 2026 source
h-index 62 2026 source

Last updated 2026-05-19 · OpenAlex profile

Cite this profile

APA 7Journal Check. (2026). Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena: Journal rankings & quartile. Journal Check. https://journal-check.com/journals/S4210235835/journal-of-vacuum-science-technology-b-nanotechnology-and-microelectronics-mater MLA 9"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena: Journal rankings & quartile." Journal Check, 2026, https://journal-check.com/journals/S4210235835/journal-of-vacuum-science-technology-b-nanotechnology-and-microelectronics-mater. Chicago 17Journal Check. "Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena: Journal rankings & quartile." 2026. https://journal-check.com/journals/S4210235835/journal-of-vacuum-science-technology-b-nanotechnology-and-microelectronics-mater. GB/T 7714Journal Check. Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena: Journal rankings & quartile[EB/OL]. (2026). https://journal-check.com/journals/S4210235835/journal-of-vacuum-science-technology-b-nanotechnology-and-microelectronics-mater.

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